Spin Coaters

SCS 6800 Series Pin Coaters

The SCS 6800 family of precision spincoat systems from Specialty Coating Systems accurately applies liquid coating materials such as photoresists, polyimides, metalloorganics, dopants and silica films on planar substrates.

Additional Features and Specifications include:

  • User friendly overlay with 4×20 character display for easy operation.
  • Proprietary circuitry provides precise control of spin speed and acceleration/deceleration rates.
  • Clear cover with safety sensor that prevents operation unless cover is in place.
  • Chuck vacuum interlock prevents start without adequate vacuum to hold product securely while spinning.
  • Inline vacuum hose strainer collects materials that enter the vacuum line, prevent vacuum line blockage.
  • Automatic N2 or air purge with interlock prevents operation without successful purge.
  • DC servomotor with sealed bearings and encoder.
  • Closed loop electronic speed and position control with encoder feedback.
  • Smaller package size for 8″ bowl unit.
    Expanded bowl size availability to 12″.
  • Black anodized aluminum bowl.
  • Sealed stainless steel interior liner.

Features of Programmable Units Only:

  • Three customer specified spin cycle settings, as well as control of optional
    dispensing system.
  • External connection for dispenser control and foot pedal actuation.
  • Programming connector for external programming.

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